Interferometric measuring device

Details Interferometric measuring device Interferometric measuring device

2003-03-28

2008-07-15

Lee, Hwa S (Department: 2886)

Optics: measuring and testing

By light interference

Using fiber or waveguide interferometer

C356S497000

Reexamination Certificate

active

07400408

ABSTRACT:
An interferometric measuring device for recording the shape, the roughness or the clearance distance of the surface of a measured object is provided, the measuring device having a modulating interferometer, to which is supplied short-coherent radiation by a radiation source, and which has a first beam splitter for splitting the radiation supplied into a first beam component guided via a first arm, and into a second beam component guided via a second arm. One beam is shifted with respect to the other beam, with the aid of a modulating device, in terms of the beam's light phase or light frequency, and passes through a delay line. The two beams are subsequently combined at an additional beam splitter of the modulating interferometer. A measuring probe that is spatially separated from the modulating interferometer is coupled to it or able to be coupled to it via a light-conducting fiber set-up, in which probe the combined beam components are split into a measuring beam guided to the surface by a probe-optical fiber unit having a slantwise exit surface on the object side and a reference beam. An accurate surface measurement is facilitated by the angle of inclination of the exit surface to the normal of the optical probe axis amounting to at least 46°.

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patent: 6741355 (2004-05-01), Drabarek
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patent: 100 57 539 (2002-05-01), None

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