Interferometric measuring device

Details Interferometric measuring device Interferometric measuring device

2005-11-22

2005-11-22

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S512000, C356S241100

Reexamination Certificate

active

06967723

ABSTRACT:
An interferometric measuring device includes a reference arm having a reference surface and a measuring arm having lighting optics for deflecting measuring light onto a measuring surface of an object to be measured, and having an image recorder connected to an analyzing device. A rapid, simple measurement with a rugged design of the measuring device may be achieved by configuring the lighting optics as a light guide body insertable into a cavity in the object to be measured, having a peripheral, radially symmetrical effective reflex surface directed radially or obliquely outward, and also including at least one deflector surface deflecting the measuring light onto same.

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patent: 100 39 239 (2002-03-01), None
patent: 101 31 778 (2003-01-01), None

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