Interferometric measuring device

Details Interferometric measuring device Interferometric measuring device

2005-08-23

2005-08-23

Font, Frank G. (Department: 2877)

Optics: measuring and testing

By shade or color

With color transmitting filter

C356S479000, C356S489000, C356S495000, C356S497000, C356S516000

Reexamination Certificate

active

06934027

ABSTRACT:
An interferometric measuring device for measuring the shape of a surface of an object having a radiation source which emits a short-coherent radiation, a beam splitter for forming an object beam which is directed via an object light path to the object, and a reference beam which is directed via a reference light path to a reflective reference plane, and having an image converter which picks up the radiation reflected back by the surface and the reference plane and brought to interference, and sends it to an analyzing device for determining a measuring result pertaining to the surface, the optical length of the object light path being changed relative to the optical length of the reference light path for analyzing the interference peak.

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J. Mod. Opt., vol. 42, No. 2, 389-401, 1995.
Th. Dresel, G. Häusler, H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt., vol. 31 No. 7, 919-925, 1992.

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