Interferometric measurements with multiple light sources

Details Interferometric measurements with multiple light sources Interferometric measurements with multiple light sources

1996-09-24

1997-10-28

Font, Frank G.

Optics: measuring and testing

By particle light scattering

With photocell detection

356345, 356351, G01B 902

Patent

active

056822405

ABSTRACT:
A method and apparatus for synchronizing the measurements of at least two interferometers (40,41) using at least two light sources (20,22), respectively. Each light source (20,22) provides a single linearly polarized output beam (21,23). Acousto-optic devices (30,31) transform each input beam (21,23) into two orthogonally polarized beams (70,72) separated by a frequency difference determined by an oscillation source (10). The oscillation source (10) drives both acousto-optic devices (30,31) with separate amplifiers (12,13) synchronizing both light sources. The two orthogonally polarized beam pairs (70,72) transverse the interferometers (40,41). The beams from the interferometers (71,73) return to the optical receivers (50,51). The optical receivers (50,51) mix the two return beam pairs (71,73) and send the resultant beat frequency (51,53) to the measurement electronics (60,62). The measurement electronics (60,62) use the oscillation source signal (11) and the beat frequencies (51,53) to determine and accumulate the phase difference. The measurement electronics (60,62) output the accumulated phase difference (61,63).

REFERENCES:
patent: 4688940 (1987-08-01), Sommargren et al.
patent: 5249030 (1993-09-01), Field et al.
N. Bobroff, "Recent Advances in Displacement Measuring Interferometry", pp. 907-926 (Measurement Science & Technology, vol. 4, No. 9, Sep. 1993).

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