Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1995-06-07
1997-08-05
Font, Frank G.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356359, G01B 902
Patent
active
056547986
ABSTRACT:
An interferometer (10) employs diffractive optics (30 and 40) for measuring errors in test surfaces (14) that differ from planes and spheres. A beam of light (28) is separated into two portions (32 and 34). One of the diffractive optics (30) can be used to reshape the second portion (34) of a beam of light (28) into a form that is different than the first portion (32) along a path of grazing incidence to the test surface (14), and the other diffractive optic (40) can be used to further reshape the second portion (34) into a form in common with the first portion (32) of the beam of light (28). The two beam portions (32 and 34) are recombined to produce an interference pattern (44) representing the errors in the test surface (14).
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Font Frank G.
Merlino Amanda
Tropel Corporation
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