Interferometric measurement of absolute dimensions of cylindrica

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356359, G01B 902

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057777381

ABSTRACT:
Cylindrical surfaces of a test cylinder are measured with a grazing incidence interferometer. Separate measures of a test cylinder's cylindrical surface and a master cylinder's surface are made and compared to obtain absolute measures of the test cylinder's surface. Surface fitting techniques are used to discount the effects of positioning errors, and a separate measurement is used to resolve remaining ambiguities for extending the range of test cylinder sizes that can be measured with absolute dimensions.

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