Interferometric measurement apparatus and method having increase

Details Interferometric measurement apparatus and method having increase Interferometric measurement apparatus and method having increase

1980-06-17

1982-11-09

Arnold, Bruce Y.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356357, 356358, G01B 902

Patent

active

043582010

ABSTRACT:
In an interferometer wherein there is provided means for directing two linearly polarized beams having their polarizations perpendicular to each other onto a surface at different angles of incidence and means for recombining the beams reflected from the object into a combined beam, the improvement wherein means for periodically varying the phase of one component of the combined beam is provided and wherein the amount of change in phase between the two component beams of the combined beam when an amplitude sensing means senses a maximum or a minimum amplitude is a measure of the topographic height variations of the object surface which is irradiated.

REFERENCES:
patent: 3561876 (1971-02-01), Hoffman
patent: 3666371 (1972-05-01), de Lang
patent: 3958884 (1976-05-01), Smith
patent: 4298283 (1981-11-01), Makosch et al.
Makosch et al, IBM Technical Disclosure Bulletin, vol. 15, No. 4, (Sep. 1972), "Measuring the Flight Height of Magnetic Heads on Magnetic Discs".

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