Interferometric measurement and alignment technique for laser sc

Details Interferometric measurement and alignment technique for laser sc Interferometric measurement and alignment technique for laser sc

1995-05-18

1996-07-30

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356363, 356138, 2191218, 359197, G01B 902

Patent

active

055417310

ABSTRACT:
A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Evaluation and alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

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