Interferometric integration technique and apparatus to confine 2

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356347, 356360, 356353, 364525, 364566, 382 41, 382 42, 382 44, 382 54, G01B 1100

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active

053214978

ABSTRACT:
A method and system are described for performing phase unwrapping integrations in a phase-shifting interferometric profiling operation. The disclosed technique uses one characteristic of modulation or slope distributions to segment the modulation or slope histogram into a plurality of sections. The principal phase values are divided into a plurality of groups in accordance with corresponding modulation or slope histogram sections. The phase unwrapping integrations are performed in such an order that the areas with a high probability of containing a 2.pi. discontinuity are contained in the last group integrated. Thus, inaccuracies due to 2.pi. discontinuities do not "propagate" to earlier-computed phase values computed by the phase unwrapping algorithm.

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