Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1992-03-09
1994-06-14
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356347, 356360, 356353, 364525, 364566, 382 41, 382 42, 382 44, 382 54, G01B 1100
Patent
active
053214978
ABSTRACT:
A method and system are described for performing phase unwrapping integrations in a phase-shifting interferometric profiling operation. The disclosed technique uses one characteristic of modulation or slope distributions to segment the modulation or slope histogram into a plurality of sections. The principal phase values are divided into a plurality of groups in accordance with corresponding modulation or slope histogram sections. The phase unwrapping integrations are performed in such an order that the areas with a high probability of containing a 2.pi. discontinuity are contained in the last group integrated. Thus, inaccuracies due to 2.pi. discontinuities do not "propagate" to earlier-computed phase values computed by the phase unwrapping algorithm.
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Ai Chiayu
Xu Yiping
Hoffman Charles R.
Keesee LaCharles
Turner Samuel A.
Wyko Corporation
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