Interferometric instrument

Details Interferometric instrument Interferometric instrument

1998-05-22

1999-08-03

Kim, Robert H.

Optics: measuring and testing

By polarized light examination

With birefringent element

356349, G01B 902

Patent

active

059332379

ABSTRACT:
An interferometric instrument for scanning the surfaces of a test object by measuring the interference maximum contains a radiation generating unit that emits briefly coherent radiation. It is possible to perform precise measurements relatively easily even at difficult-to-access points on the test object by splitting the first beam into at least two additional beams using at least one additional beam splitter. One additional beam, referred to as a reference beam, is supplied to a reference mirror positioned at a specific distance from the additional beam splitter. Another additional beam, referred to as a measuring beam, is deflected to a specific measuring point on the test object. The interference maxima of the reference beam and the measuring beam can be detected separately by the photodetector arrangement and the control system.

REFERENCES:
patent: 4995726 (1991-02-01), Fujita et al.
patent: 5061071 (1991-10-01), Fujita et al.
patent: 5493395 (1996-02-01), Otsuka
patent: 5526118 (1996-06-01), Miyagawa et al.
Dresel et al., "Three Dimensional Sensing of Rough Surfaces By Coherence Radar", App. Opt., vol. 3, No. 7, Mar. 1, 1992.

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