Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Patent
1995-05-30
1999-04-06
Bowers, Charles L.
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Including integrally formed optical element
438 32, 438 52, 356358, G01B 1116
Patent
active
058917470
ABSTRACT:
A method is presented to produce a change in the optical path length in the gap between two single mode optical fibers proportional to the lateral displacement of either fiber end normal to its axis. This is done with the use of refraction or diffraction at the interface between a guiding and non-guiding media to change the direction of propagation of the light in the gap. A method is also presented for laying a waveguide on a cantilever so that the displacement of the tip of the cantilever produces a proportional path length change in the gap by distancing the waveguide from the neutral axis of the cantilever. The fiber is supported as a cantilever or a waveguide is deposited on a micromachined cantilever and incorporated in an interferometer which is made totally on a silicon substrate with the use of integrated-optic technology. A resonant element in the form of a micro-bridge is incorporated in the ridge waveguide and produces a frequency output which is readily digitizeable and immune to laser frequency noise. Finally, monolithic mechanical means for phase modulation are provided on the same sensor substrate. This is done by vibrating the cantilever or micro-bridge either electrically or optically.
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Kevin E. Burcham, Gregory N. de Brabander and Joseph T. Boyd "Micromachined Silicon Cantilever Beam Accelerometer Incorporating an Integrated Optical Waveguide". Sep. 1992, 7 pages.
P.J. Mulhern, T. Hubbard, C.S. Arnold, B.L. Blackford, and M.H. Jeri "A scanning force microscope with a fiber-optic interferometer displacement sensor". May 1991. p. 1281.
Bowers Charles L.
Whipple Matthew
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