Interferometric distance measuring apparatus utilizing an asymme

Details Interferometric distance measuring apparatus utilizing an asymme Interferometric distance measuring apparatus utilizing an asymme

1994-12-27

1996-10-01

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, G01B 902

Patent

active

055615244

ABSTRACT:
An interferometric distance measuring interferometer comprises a light source (11) for irradiating a main light beam (L), a beam splitting member (56) for splitting the main light beam into a first light beam (MR1, MR2) and a second light beam (MM1, MM2), a first reflection member (28) and second reflection member (14) for reflecting the first light beam and the second light beam, respectively, an optical composition member (25) for compositing the first light beam reflected by the first reflection member (28) and the second light beam reflected by the second reflection member (14), and a photoelectric converter (19) for receiving the composited light beam from the optical composition member. Whereby, a relative displacement between the first reflection member (28) and the second reflection member (14) is detected based on a photoelectric conversion signal from the photoelectric converter (19). The apparatus according to the present invention further comprises an asymmetric conversion member (12) for establishing the optical intensity distribution of a cross-section of at least one beam selected from a group of light beams including the main light beam (L) irradiated from the light source (11), the first light beam (MR1, MR2) and the second light beam (MM1, MM2). The asymmetric conversion member is arranged at at least one portion on an optical path of the light beam between the light source (11) and the photoelectric converter (19).

REFERENCES:
patent: 4650330 (1987-03-01), Fujita

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