Interferometric device for detecting a centering error

Details Interferometric device for detecting a centering error Interferometric device for detecting a centering error

1990-10-22

1993-10-12

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, G01B 902

Patent

active

052530388

ABSTRACT:
A device for detecting a centering error of a rotationally symmetrical surface (0.sub.1, 0.sub.2) of an object (0) with respect to a rotational axis (AR) about which axis the object is rotated for the purpose of the centering error detection is described. Two beams (b.sub.1, b.sub.2 ; b.sub.3, b.sub.4) at angles of approximately 90.degree. are directed onto the object and the variation in the phase difference caused by the centering error (.epsilon.) between the two beams (b.sub.1, b.sub.2 ; b.sub.3, b.sub.4) reflected by the surface is determined.

REFERENCES:
patent: 3528748 (1970-09-01), Burch et al.
patent: 3832063 (1974-08-01), Matsumoto et al.
patent: 3877816 (1975-04-01), Weiss et al.
patent: 4298283 (1981-11-01), Makosch et al.
patent: 4353650 (1985-10-01), Sommargren
Philips Technical Review, vol. 30, 1696, pp. 160-166.

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