Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1995-08-04
1997-07-08
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
250307, G01B 902
Patent
active
056467311
ABSTRACT:
A method for detecting and/or imaging a workpiece. In a detection aspect, the method comprises the steps of sampling an electromagnetic wave packet representative of workpiece properties and comprising encoded wave information derivable from a multi-pole interactive coupling between a probe tip and the workpiece; decoding said electromagnetic wave packet by interrogating at least one of its phase and amplitude information; and, using the decoding information as a means for detecting the presence of the workpiece. In an imaging aspect, the method includes incorporating the previous steps in a scanning operation for developing an image representative of the workpiece.
REFERENCES:
patent: 5340981 (1994-08-01), De Fornel et al.
F. Zenhausern, et al, "Apertureless near-field optical microscope", Appl. Phys. Lett. 65 (13) 26 Sep. 1994, pp. 1623-1625.
Martin Yves
O'Boyle Martin Patrick
Wickramasinghe Hemantha Kumar
Zenhausern Frederic
International Business Machines - Corporation
Kaufman Stephen C.
Merlino Amanda
Turner Samuel A.
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