Interferometric defect detection

Details Interferometric defect detection Interferometric defect detection

2011-01-04

2011-01-04

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S239700

Reexamination Certificate

active

07864334

ABSTRACT:
Methods and systems for using common-path interferometry are described. In some embodiments, a common-path interferometry system for the detection of defects in a sample is described. An illumination source generates and directs coherent light toward the sample. An optical imaging system collects light reflected from the sample including a scattered component of that is predominantly scattered by the sample, and a specular component that is predominantly undiffracted by the sample. A variable phase controlling system is used to adjust the relative phase of the scattered component and the specular component so as to improve the ability to detect defects in the sample.

REFERENCES:
patent: 6259055 (2001-07-01), Sokol et al.
patent: 6501551 (2002-12-01), Tearney et al.
patent: 6934035 (2005-08-01), Yang et al.
patent: 7061625 (2006-06-01), Hwang et al.
patent: 7095507 (2006-08-01), Hwang et al.
patent: 7138629 (2006-11-01), Noji et al.
patent: 7209239 (2007-04-01), Hwang et al.
patent: 7259869 (2007-08-01), Hwang et al.
patent: 7351969 (2008-04-01), Watanabe et al.
patent: 7357513 (2008-04-01), Watson et al.
patent: 7365858 (2008-04-01), Fang-Yen et al.
patent: 7428057 (2008-09-01), De Lega et al.
patent: 7446882 (2008-11-01), De Lega et al.
patent: 7616323 (2009-11-01), De Lega et al.
patent: 2002/0066318 (2002-06-01), Dubois et al.
patent: 2005/0105097 (2005-05-01), Fang-Yen et al.
patent: 2006/0132804 (2006-06-01), Dubois et al.
patent: 2006/0158657 (2006-07-01), De Lega et al.
patent: 2006/0158658 (2006-07-01), Colonna De Lega et al.
patent: 2006/0158659 (2006-07-01), Colonna De Lega et al.
patent: 2006/0215174 (2006-09-01), Dubois et al.
patent: 2008/0007726 (2008-01-01), Fairley et al.
patent: 2008/0024766 (2008-01-01), Mieher et al.
patent: 2008/0088849 (2008-04-01), De Lega et al.
patent: 2008/0221814 (2008-09-01), Trainer
patent: 2008/0266547 (2008-10-01), Clark et al.
patent: 2008/0291465 (2008-11-01), Lorraine et al.
patent: 2009/0296096 (2009-12-01), Jeong
patent: 2010/0134786 (2010-06-01), De Lega et al.
M. Francon, “Optical Interferometry,” Academic Press, New York and London, 1966, p. 289.
Philip C. D. Hobbs. “Building Electro-Optical Systems; Making it all work,” John Wiley & Sons, Inc., 2000, pp. 30-32.
R. M. A. Azzam and N. M. Bashara, “Ellipsometry and Polarized Light” Elsevier Science B. V., 1999, pp. 72-84.
Aug. 5, 2009 International Search Report in connection with counterpart International Application No. PCT/US2009/045999.
Aug. 5, 2009 Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration in connection with counterpart International Application No. PCT/US2009/045999.
Aug. 5, 2009 Written Opinion of the International Searching Authority in connection with counterpart International Application No. PCT/US2009/045999.

Affiliated with

Also associated with

Rating

Interferometric defect detection does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Interferometric defect detection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interferometric defect detection will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2689989