Interferometric contact-free measuring method for sensing motion

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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73657, G01B 902

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active

046195297

ABSTRACT:
An interferometric contact-free measuring method for sensing, by a laser beam, motional surface deformation of a workpiece subject to an ultrasonic vibration, comprising splitting the laser beam into a measuring beam incident upon a measuring point on the workpiece and a reference beam incident upon a reference point close to the measuring point, and bringing the two beams, after reflection, into a common optical detector.

REFERENCES:
patent: 3796495 (1974-03-01), Laub
patent: 3854325 (1974-12-01), Coate
patent: 4046477 (1977-09-01), Kaule
patent: 4147435 (1979-04-01), Habegger
patent: 4172382 (1979-10-01), Murphy et al.
Palmer, "Ultrasonic Surface Wave Detection by Optical Interferometry", J. Acoustical Soc. Amer., vol. 53, No. 3, pp. 948-949, 3/73.

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