Interferometric back focal plane scatterometry with Koehler...

Details Interferometric back focal plane scatterometry with Koehler... Interferometric back focal plane scatterometry with Koehler...

2006-06-13

2006-06-13

Turner, Samuel A. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07061623

ABSTRACT:
An interference spectroscopy instrument provides simultaneous measurement of specular scattering over multiple wavelengths and angles. The spectroscopy instrument includes an interference microscope illuminated by Koehler illumination and a video camera located to image the back focal plane of the microscope's objective lens while the path-length difference is varied between the reference and object paths. Multichannel Fourier analysis transforms the resultant intensity information into specular reflectivity data as a function of wavelength. This multitude of measured data provides a more sensitive scatterometry tool having superior performance in the measurement of small patterns on semiconductor devices and in measuring overlay on such devices.

REFERENCES:
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patent: 5398113 (1995-03-01), de Groot
patent: 6545763 (2003-04-01), Kim et al.
See et al , Scanning optical microellipsometer for pure surface profiling, Applied Optics, Dec. 1996, pp. 6663-6668.
Feke et al., Interferometric Back Focal Plane Microellipsometry, Applied Optics/ vol. 33, No. 101 Apr. 1, 1998 p. 1746.

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