Interferometric arrangement for scanning an object

Details Interferometric arrangement for scanning an object Interferometric arrangement for scanning an object

1998-02-09

1999-10-26

Kim, Robert H.

Optics: measuring and testing

By particle light scattering

With photocell detection

356351, 356354, 356357, G01B 902

Patent

active

059737816

ABSTRACT:
An interferometric arrangement for scanning an object with an illumination beam path comprises a diffractive optical element (DOE) for generating differently directed beam components of the illuminating light. The DOE is arranged in the illumination beam path in front of at least one scanning element deflecting the illuminating light in at least one direction.

REFERENCES:
patent: 5353073 (1994-10-01), Kobayashi
patent: 5719673 (1998-02-01), Dorsel et al.
patent: 5877856 (1999-03-01), Fercher

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