Interferometric apparatus utilizing a cantilever array to...

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

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C356S486000

Reexamination Certificate

active

07545508

ABSTRACT:
A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.

REFERENCES:
patent: 4935634 (1990-06-01), Hansma et al.
patent: 5141319 (1992-08-01), Kajimura et al.
patent: 5214282 (1993-05-01), Yamaguchi et al.
patent: 5283442 (1994-02-01), Martin et al.
patent: 5294804 (1994-03-01), Kajimura
patent: 5298975 (1994-03-01), Khoury et al.
patent: 5376790 (1994-12-01), Linker et al.
patent: 5463897 (1995-11-01), Prater et al.
patent: 5465046 (1995-11-01), Campbell et al.
patent: 5852233 (1998-12-01), Arnold et al.
patent: 5939709 (1999-08-01), Ghislain et al.
patent: 6196061 (2001-03-01), Adderton et al.
patent: 7414731 (2008-08-01), Chu et al.
patent: 7463364 (2008-12-01), Yacoubian
patent: 2004/0060358 (2004-04-01), Datskos
patent: 2006/0162455 (2006-07-01), Kawakatsu
patent: 1054249 (2000-11-01), None
patent: 4-102008 (1992-04-01), None
patent: 10-81951 (1998-03-01), None
patent: 2000-65716 (2000-03-01), None
patent: 2000-199737 (2000-07-01), None
patent: 2001-91441 (2001-04-01), None
Melles Griot catalogue, 1995, Bibby Electro-Optics Company, Rev. A, p. 67-2.
U.S. Appl. No. 11/454,989, filed Jun. 19, 2006, Kawakatsu.
U.S. Appl. No. 11/454,986, filed Jun. 19, 2006, Kawakatsu.
U.S. Appl. No. 11/454,987, filed Jun. 19, 2006, Kawakatsu.

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