Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-06-19
2009-06-09
Connolly, Patrick J (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S486000
Reexamination Certificate
active
07545508
ABSTRACT:
A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.
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Connolly Patrick J
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Richey Scott M
The Foundation For The Promotion Of Industrial Science
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