Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1996-10-15
1998-03-03
Font, Frank G.
Optics: measuring and testing
By particle light scattering
With photocell detection
356351, 356358, G01B 902, G01B 1102
Patent
active
057241368
ABSTRACT:
An interferometric system for measuring motions of a stage 16 relative to fixed reflectors 24, 25 comprises a source 10 of a single frequency, linearly polarized, frequency stabilized light beam which is launched into an optical fiber 12 to deliver the beam to a module 14 on the moving stage 16. The module 14 contains an acousto-optical device 42 or single to two frequency generator, for generating a beam with a frequency difference between the two orthogonal polarization components states of the beam exiting the generator 42, as well as beam shaping and splitting optics 40, 46, a pair of interferometers 52, 54, optical mixers, and focusing optics 32, 34 for launching the output beams 55, 57 of the interferometers 52, 54 onto optical fibers 26, 28 which deliver the interference signals to photoelectric detectors 36, 38 and processing electronics which provide data for the stage 16 motion.
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Cave LLP Bryan
Font Frank G.
Vierra-Eisenberg Jason D.
Zygo Corporation
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