Interferometric apparatus

Details Interferometric apparatus Interferometric apparatus

1975-04-16

1976-05-25

Corbin, John K.

Optics: measuring and testing

Refraction testing

Prism engaging specimen

356109, 350 12, G01B 902, G02B 2106

Patent

active

039588840

ABSTRACT:
An interferometric apparatus comprises an optical assembly which simultaneously directs two mutually coherent light pencils at different respective angles of incidence towards a point on a surface and receives the reflected light pencils therefrom. The assembly includes optical means bringing the reflected pencils at least partially into coincidence so that they can interfere optically in a manner varying with variation in the distance of points on the surface from a reference plane. The assembly may be combined with a microscope to form a "pupil-shearing micro-interferometer" for investigating surface topography.

REFERENCES:
patent: 2911880 (1959-11-01), Rantsch
patent: 3825349 (1974-07-01), Nomarski

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