Interferometric angular measurement system

Details Interferometric angular measurement system Interferometric angular measurement system

1981-12-03

1985-05-14

Arnold, Bruce Y.

Optics: measuring and testing

By polarized light examination

With birefringent element

G01B 1126

Patent

active

045168547

ABSTRACT:
An interferometric system for general use to measure the angular relationship of two surfaces of the same object, or of different objects, or the relative angular change of one surface with respect to another. This device uses coherent light, a set of mirrors aligned as a Ludman Interferometer, and a reference pair of mirrors with a well known fixed angle similar to that of the angle of the sample pair to be measured. In preferred embodiments, the fixed angle mirror pair has a fine tilt adjustment to facilitate the interpretation of the output fringe pattern.

REFERENCES:
patent: 3034397 (1962-05-01), Saunders
patent: 4056323 (1977-11-01), Ludman
Zubakov, V. G. et al., "An Interference Method of Measuring Small Deviations of Angles from Specified Values", Soviet J. Opt. Tech, vol. 42, No. 10, Oct. 1975.

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