Interferometric analysis for the manufacture of nano-scale...

Details Interferometric analysis for the manufacture of nano-scale... Interferometric analysis for the manufacture of nano-scale...

2007-11-06

2007-11-06

Tarcza, Thomas H. (Department: 3662)

Optics: measuring and testing

Angle measuring or angular axial alignment

Automatic following or aligning while indicating measurement

C356S139010, C356S139100

Reexamination Certificate

active

11000331

ABSTRACT:
The present invention features a system to determine relative spatial parameters between two coordinate systems, which may be a mold and a region of a substrate in which mold is employed to generate a pattern. The system senses relative alignment between the two coordinate systems at multiple points and determines relative spatial parameters therebetween. The relative spatial parameters include a relative area and a relative shape.

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