Interferometer with reduced shear

Details Interferometer with reduced shear Interferometer with reduced shear

2006-05-16

2006-05-16

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

Reexamination Certificate

active

07046370

ABSTRACT:
An interferometer that includes a first beam-splitting surface positioned to separate an input beam into a first beam and a second beam. A first set of optics is positioned to receive the first beam, direct it to contact a first reflector multiple times and produce a first intermediate beam. The first intermediate beam follows a nominal output path when the first reflector has a first alignment normal to the first beam prior to reflection by the first reflector. The first set of optics includes a second beam-splitting surface, a third beam-splitting surface, and a first fold optic that are positioned to reduce displacement of the first intermediate beam from the nominal output path when the first reflector has an alignment different from the first alignment.

REFERENCES:
patent: 5200797 (1993-04-01), Tank et al.
patent: 5471304 (1995-11-01), Wang
patent: 5675412 (1997-10-01), Solomon
patent: 5757491 (1998-05-01), Cai et al.
patent: 6201609 (2001-03-01), Hill et al.
patent: 6791693 (2004-09-01), Hill
patent: 6806960 (2004-10-01), Bagwell et al.
patent: 2003/0053079 (2003-03-01), Hill

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