Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-01-19
2009-11-10
Connolly, Patrick J (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S497000
Reexamination Certificate
active
07616323
ABSTRACT:
Disclosed is a system including: (i) an interferometer configured to direct test electromagnetic radiation to a test surface and reference electromagnetic radiation to a reference surface and subsequently combine the electromagnetic radiation to form an interference pattern, the electromagnetic radiation being derived from a common source; (ii) a multi-element detector; and (iii) one or more optics configured to image the interference pattern onto the detector so that different elements of the detector correspond to different illumination angles of the test surface by the test electromagnetic radiation. The apparatus is configured to operate in a first mode in which the combined light is directed to the detector so that the different regions of the detector correspond to the different illumination angles of the test surface by the test light, and a second mode in which the different regions of the detector correspond to the different regions of the test surface illuminated by the test light to enable a profiling mode of operation.
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Colonna De Lega Xavier
De Groot Peter
Connolly Patrick J
Fish & Richardson P.C.
Zygo Corporation
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