Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1996-10-16
1998-05-26
Font, Frank G.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356360, 359487, 359727, G01B 1100
Patent
active
057574936
ABSTRACT:
A catadioptric imaging system for an interferometer includes a beamsplitter plate for reflecting a beam of light to a concave mirror for transmitting reflected light from the mirror. The beamsplitter reflections and transmissions produce opposite sign spherical aberrations. A refractive optic is located between the beamsplitter plate and a convex test surface for removing residual spherical aberrations and for permitting more variability in the positioning of the beamsplitter plate. Design variables for both the refractive optic and the position of the beamsplitter plate can be used to adjust a numerical aperture of the beam approaching the test surface. The refractive optic can also be used as a Fizeau objective to further reduce errors in the imaging system.
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Font Frank G.
Tropel Corporation
Vierra-Eisenberg Jason D.
LandOfFree
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