Interferometer which varies a position to be detected based on i

Details Interferometer which varies a position to be detected based on i Interferometer which varies a position to be detected based on i

1997-12-23

1999-11-23

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356360, G01B 902

Patent

active

059910348

ABSTRACT:
An interferometer which can vary a direction of an incident beam and which enables more accurate measurement while avoiding eclipse includes an optical system adapted to form an interference beam from a beam from a surface to be measured, and a detected position varying member for varying a position to be detected of the interference beam in accordance with information on inclination of the surface to be measured.

REFERENCES:
patent: 4611916 (1986-09-01), Yoshizumi
patent: 5135307 (1992-08-01), De Groot et al.
patent: 5485275 (1996-01-01), Ohtsuka
Yoshizumi, K., et al., Precise Measuring System for Aspheric Surfaces, Optics, vol. 12, No. 6, pp. 450-454 (Dec. 1983).
Bruning, J.H. et al., Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and Lenses, Applied Optics, vol. 13, No. 11, pp. 2693-2703 (Nov. 1974).

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