Interferometer utilizing polarization scanning

Details Interferometer utilizing polarization scanning Interferometer utilizing polarization scanning

2011-07-12

2011-07-12

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

C359S371000

Reexamination Certificate

active

07978337

ABSTRACT:
In one aspect, the disclosure features methods that include using a microscope to direct light to a test object and to direct the light reflected from the test object to a detector, where the light includes components having orthogonal polarization states, varying an optical path length difference (OPD) between the components of the light, acquiring an interference signal from the detector while varying the OPD between the components, and determining information about the test object based on the acquired interference signal.

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