Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2005-01-25
2005-01-25
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
Having polarization
Reexamination Certificate
active
06847457
ABSTRACT:
An integrated imaging element for an interferometer generates at least one interference image that includes multiple interference portions with different relative phase shifts interleaved in a pattern having a high spatial frequency in the image. The interleaved pattern is at least partially determined by the pattern of a high density relative retarder array used in the integrated imaging element. In various embodiments, the multiple interference portions are interleaved in a checkerboard-like pattern across the entire surface of a detector device. As a result, various non-common mode errors present in various interferometers that generate separate non-interleaved images for each relative phase are reduced or eliminated.
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Atherton Kim W.
Tobiason Joseph D.
Lyons Michael A.
Mitutoyo Corporation
Turner Samuel A.
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