Interferometer system of compact configuration

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

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C356S477000

Reexamination Certificate

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06882433

ABSTRACT:
An expanding measuring beam is inserted into a cavity of a frequency-scanning interferometer. The expanding measuring beam encounters non-specular (diffuse) reference and object surfaces so that the reflected light can be imaged with an imaging system of reduced dimension. The compact interferometer is adaptable to a variety of applications. For example, the compact interferometer can be incorporated into a sensor of a multi-stage measuring instrument or into a handheld imager.

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