Interferometer system for monitoring an object

Details Interferometer system for monitoring an object Interferometer system for monitoring an object

2007-01-23

2009-12-22

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07636166

ABSTRACT:
In general, in one aspect, the invention features a system that includes a first object mounted relative to a second object, the first object being moveable with respect to the second object. The system includes a plurality of interferometers each configured to derive a first wavefront and a second wavefront from input radiation and to combine the first and second wavefronts to provide output radiation including information about an optical path length difference between the paths of the first and second wavefronts, each interferometer including a reflective element positioned in the path of the first wavefront, and at least one of the interferometer's reflective element is mounted on the first object. The system also includes a plurality of fiber waveguides and an electronic controller. Each fiber waveguide is configured to deliver the input radiation to a corresponding interferometer or deliver the output radiation from the corresponding interferometer to a corresponding detector. The electronic controller is configured to monitor a degree of freedom of the first object relative to the second object based on the information from at least one of the interferometers, wherein the degree of freedom is an absolute displacement between the first and second objects.

REFERENCES:
patent: 4699513 (1987-10-01), Brooks et al.
patent: 4928527 (1990-05-01), Burger et al.
patent: 5202939 (1993-04-01), Belleville et al.
patent: 5539517 (1996-07-01), Cabib et al.
patent: 5541730 (1996-07-01), Chaney
patent: 5596409 (1997-01-01), Marcus et al.
patent: 5659392 (1997-08-01), Marcus et al.
patent: 5898501 (1999-04-01), Suzuki et al.
patent: 6034774 (2000-03-01), Marcus et al.
patent: 6038027 (2000-03-01), Marcus et al.
patent: 6067161 (2000-05-01), Marcus et al.
patent: 6075601 (2000-06-01), Marcus et al.
patent: 6082892 (2000-07-01), Adel et al.
patent: 6175669 (2001-01-01), Colston et al.
patent: 6181430 (2001-01-01), Meyer et al.
patent: 6359692 (2002-03-01), de Groot
patent: 6370299 (2002-04-01), Green et al.
patent: 6490046 (2002-12-01), Drabarek et al.
patent: 6538746 (2003-03-01), Handrich
patent: 6563588 (2003-05-01), Behroozi
patent: 6624891 (2003-09-01), Marcus et al.
patent: 6721510 (2004-04-01), Graves et al.
patent: 6741355 (2004-05-01), Drabarek
patent: 6816264 (2004-11-01), Dobbs
patent: 6822745 (2004-11-01), De Groot
patent: 6842254 (2005-01-01), Van Neste et al.
patent: 6847453 (2005-01-01), Bush
patent: 6901176 (2005-05-01), Balachandran et al.
patent: 6977730 (2005-12-01), Evans
patent: 7012700 (2006-03-01), de Groot
patent: 7046371 (2006-05-01), Colonna de Lega
patent: 7187453 (2007-03-01), Belleville
patent: 7206076 (2007-04-01), Blalock
patent: 7355684 (2008-04-01), Jeffers et al.
patent: 7372575 (2008-05-01), Fujita
patent: 7417740 (2008-08-01), Alphonse et al.
patent: 7417743 (2008-08-01), de Groot
patent: 7428052 (2008-09-01), Fujita
patent: 7446881 (2008-11-01), Suzuki et al.
patent: 7488929 (2009-02-01), Townley-Smith
patent: 7492468 (2009-02-01), Henselmans et al.
patent: 7492469 (2009-02-01), de Groot
patent: 2002/0085208 (2002-07-01), Hauger et al.
patent: 2003/0035111 (2003-02-01), Nevis
patent: 2003/0223079 (2003-12-01), Hill
patent: 2004/0085546 (2004-05-01), Hill
patent: 2005/0232531 (2005-10-01), Hadley et al.
patent: 2006/0103850 (2006-05-01), Alphonse et al.
patent: 2007/0127034 (2007-06-01), Koshimizu et al.
International Search Report, Jan. 23, 2006.
M. Marcus, “Fiber optic interferometry for industrial process monitoring and control applications,” Proc. SPIE, vol. 4578, pp. 136-144 (2002).
U.S Appl. No. 60/177,912, filed Jan. 2000, de Groot.
de Groot, Peter et al., “Laser Gage Using Chirped Synthetic Wavelength Interferometry,” Proceedings of SPIE 1821-12:1-10 (1993).
Lay, O.P. et al., “Coherent Range-Gated Laser Displacement Metrology with Compact Optical Head,” Optics Letters 32:2933-2935 (2007).
Weng, Jidong et al., “A Compact All-Fiber Displacement Interferometer for Measuring the Foil Velocity Diven by Laser,” Review of Scientific Instruments 79:113101-11303 (2008).

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