Interferometer system for making length or angle measurements

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356361, G01B 902

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active

048137839

ABSTRACT:
The invention is directed to an interferometer which includes two interferometer systems and with which length measurement or angle measurement as well as index of refraction measurement can be conducted simultaneously. For this purpose, at least one component beam from the measuring arm of the one interferometer system and a component beam from a comparison arm of the other interferometer system are directed through an evacuable arrangement.

REFERENCES:
patent: 4685803 (1987-08-01), Sommargren
Kinder, "Ein Meter-Komparator fur interferometrische Langeubestimmungen in Vakuum-Wellenlangen", Zeiss Wenkzeitschrift, vol. 43, pp. 3-11, 1962.
Grace, "Alaser Calibrator-Compensator to Upgrade the Long-Term Accuracy of a Commerical Laser Interferometer", Proc-SPIE, vol. 24?, pp. 192-199, 1980.

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