Interferometer system and lithograph apparatus including an inte

Details Interferometer system and lithograph apparatus including an inte Interferometer system and lithograph apparatus including an inte

1998-07-13

2000-02-01

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, 356401, G01B 902

Patent

active

06020964&

ABSTRACT:
A composite interferometer system has a plurality of X and/or Y measuring axes which co-operate with an X and/or Y measuring mirror arranged on an object. The interferometer system also has at least one Z measuring axis, which extends partly in an XY plane and co-operates with Z measuring mirrors arranged on the object and Z reflectors. Thus, a larger number of more accurate and reliable measurements can be performed with the interferometer system.

REFERENCES:
patent: 4976019 (1990-12-01), Kitamura

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