Optics: measuring and testing – By polarized light examination – With birefringent element
Patent
1995-12-20
1996-10-01
Turner, Samuel A.
Optics: measuring and testing
By polarized light examination
With birefringent element
356345, 356351, G11B 902
Patent
active
055615252
ABSTRACT:
An interferometer is used for observing the shape of a surface to be detected with the desired spatial resolution. A variable aperture stop is arranged at a Fourier transform image plane of the surface to be detected within an imaging optical system for forming an interference pattern of a reference light and a measuring light. The aperture diameter of the variable aperture stop is adjusted by a control in accordance with the desired spatial resolution.
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Ealing Electro-Optics Product Guide, pp. 297-300, 1987/1988 Product Guide.
Gemma Takashi
Toyonaga Shuji
Kim Robert
Nikon Corporation
Turner Samuel A.
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