Interferometer for measurement of dome-like objects

Details Interferometer for measurement of dome-like objects Interferometer for measurement of dome-like objects

2008-05-20

2008-05-20

Lee (Andrew), Hwa S (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

11488532

ABSTRACT:
An interferometer is provided, comprising a source, a unit under test (UUT) with at least a first surface and second surface, a reflective optic, a detector and light from the source. The light is transmitted through the unit under test and reflects off of the reflective optic, which directs the light back to the unit under test. A first portion of light is reflected off the first surface of the UUT. A second portion of light is reflected off the second surface of the UUT. The first and second portions of light are then reflected by the reflective optic and are then transmitted through the UUT. The two portions of light are incident on the detector, where the first and second portions of light coherently add and the interference pattern is detected by the detector. A method for measuring the transmitted wavefront of the UUT is also provided.

REFERENCES:
patent: 5410407 (1995-04-01), Zielinski et al.
patent: 5410408 (1995-04-01), Evans et al.
Simpson, F.A., B.H. Oland, and J. Meckel, “Testing Convex Ashperic Lens Surfaces with a Modified Hindle Arrangement,” Optical Engineering, May/Jun. 1974, vol. 13-No. 3, pp. G101,G103,G105-G107,G109.
Optical Shop Testing, 2ndEdition, Malacara, Daniel, Editor, John Wiley Sons, Inc., New York, 1992, pp. 450-452.

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