Interferometer for determining the shape of an object

Details Interferometer for determining the shape of an object Interferometer for determining the shape of an object

1977-11-21

1980-09-16

Clark, Conrad J.

Optics: measuring and testing

By polarized light examination

With birefringent element

G01B 902

Patent

active

042226694

ABSTRACT:
This invention relates to an interferometric process, and particularly to a process for examining the planarity of surfaces.

REFERENCES:
patent: 4022532 (1977-05-01), Montagnino

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