Interferometer, exposure apparatus, exposure method and...

Details Interferometer, exposure apparatus, exposure method and... Interferometer, exposure apparatus, exposure method and...

2006-07-25

2006-07-25

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07081960

ABSTRACT:
A first polarizing beam splitter splits the light emitted by a light source into a measurement beam and a reference beam. The reference beam is returned by a second polarizing beam splitter and an optical member which is constituted by a right angle prism and a pentaprism, reenters the first polarizing beam splitter via a half wavelength plate and guided to a detector. On the other hand, the measurement beam is reflected by a corner mirror, is returned by the second polarizing beam splitter and the optical member, is reflected by the corner mirror again, reenters the first polarizing beam splitter via a half wavelength plate and guided to the detector. The optical member returns the measurement beam such that the measurement beam exits at the different point from the incident point and that light rays incident thereon in a state shifted from each other are returned with the shifted direction and shifted amount between each light rays kept unchanged.

REFERENCES:
patent: 5541728 (1996-07-01), Dierking
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6208424 (2001-03-01), de Groot
patent: 6252667 (2001-06-01), Hill et al.
patent: A 63-44101 (1988-02-01), None
patent: A 10-26508 (1998-01-01), None

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