Interferometer calibration methods and apparatus

Details Interferometer calibration methods and apparatus Interferometer calibration methods and apparatus

2007-05-01

2007-05-01

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

Having partially reflecting plates in series

C359S579000

Reexamination Certificate

active

11426543

ABSTRACT:
A Fabry-Perot (FP) interferometer includes substantially parallel first and second reflecting surfaces spaced apart by an optical gap between the first and second reflecting surfaces. The FP interferometer also has a mechanism for controlling the optical gap. The mechanism includes a plurality of electrostatic control plates. Each electrostatic control plate has a fixed control-plate area. Each control plate is adapted to control the optical gap by application of a control-plate voltage. The control-plate areas are related by integral ratios.

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