Interferometer calibration methods and apparatus

Details Interferometer calibration methods and apparatus Interferometer calibration methods and apparatus

2006-09-19

2006-09-19

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S519000, C359S579000

Reexamination Certificate

active

07110122

ABSTRACT:
A method for calibrating an interferometer uses an actuator adapted to control an optical gap in response to application of an electrical signal. The interferometer is illuminated with a beam of light having a predetermined substantially monochromatic wavelength, oriented at a first predetermined angle of incidence, and light reflected from the interferometer at a second predetermined angle is detected while varying an electrical signal applied to the actuator, thereby establishing a calibrated relationship between the applied electrical signal and an optical path length of the interferometer.

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