Interferometer-based bolometer

Details Interferometer-based bolometer Interferometer-based bolometer

1996-09-09

1997-05-13

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

25033902, 356352, G01J 345, G01J 520

Patent

active

056295219

ABSTRACT:
An infrared detector device is described. It is based on an infrared analog of the Fabry Perot interferometer, using one curved, fully reflecting, plate and one planar, mainly reflecting, but partially transmitting, plate. The space between these plates behaves as a resonant cavity which can be built to respond to either a broad or a narrow band of wavelengths in the general range between 1 and 15 microns. It is also possible to combine several detectors of different narrow bands in a single device. Actual detection of the radiation is based on use of thin film resistors, having a high thermal coefficient of resistance, that are thermally isolated from the other parts of the structure. Details relating to the manufacture of the devices are given.

REFERENCES:
patent: 4574263 (1986-03-01), Liddiard
patent: 5286976 (1994-02-01), Cole
patent: 5300915 (1994-04-01), Higashi et al.
patent: 5367167 (1994-11-01), Keenan
patent: 5369280 (1994-11-01), Liddiard
patent: 5550373 (1996-08-01), Cole et al.
patent: 5589689 (1996-12-01), Koskinen

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