Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2007-12-18
2007-12-18
Lyons, Michael A. (Department: 2877)
Optics: measuring and testing
By light interference
Having polarization
Reexamination Certificate
active
11071878
ABSTRACT:
In general, in one aspect, the invention features apparatus that include an interferometer including a main assembly having two laterally displaced polarizing beam splitter interfaces, wherein the interfaces are positioned to receive two spatially separated beams and direct them each to make at least two passes to one or more remote objects. Each interface reflects and transmits each beam at least once, and the interferometer is configured to combine the two beams after they make the at least two passes to the one or more remote objects to produce an output beam including information about an optical path length difference between paths traveled by the two beams.
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Fish & Richardson P.C.
Lyons Michael A.
Zygo Corporation
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