Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1996-02-09
1998-02-17
Font, Frank G.
Optics: measuring and testing
By particle light scattering
With photocell detection
250237G, 250358, G01B 902
Patent
active
057196737
ABSTRACT:
An interferometer arrangement has an adjustable optical path length difference in at least one interferometer arm and a photoelectric receiver for detecting the interference signals generated by the interferometer. An incremental grating transmitter is coupled to the arrangement with a device for changing the optical path length difference and for generating a reference signal which changes its frequency like that of the interference signal depending on the rate of change of the optical path difference.
REFERENCES:
patent: 5321501 (1994-06-01), Swanson et al.
patent: 5402230 (1995-03-01), Tian et al.
patent: 5486918 (1996-01-01), Nagashima
patent: 5523838 (1996-06-01), Nagashima
patent: 5576834 (1996-11-01), Hamada
Donnerhacke Karl-Heinz
Dorsel Andreas
Maschke Guenter
Moeller Beate
Carl Zeiss Jena GmbH
Font Frank G.
Kim Robert
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