Interferometer apparatus for detecting relative movement between

Details Interferometer apparatus for detecting relative movement between Interferometer apparatus for detecting relative movement between

1994-12-20

1995-08-22

Mintel, William

Optics: measuring and testing

By particle light scattering

With photocell detection

356351, 356358, 356363, G01B 902

Patent

active

054445329

ABSTRACT:
An interferometer apparatus includes a prism member provided with a polarization beam splitter surface and a reflecting surface. A light beam from a laser source is split into first and second light beams by the polarization beam splitter surface. The first light beam passes through a quarter wave plate and is incident on a first movable mirror. The second light beam is incident on a rectangular prism and reflected therefrom. The reflected second light beam passes through a half wave plate and is incident on an upper portion of the polarization beam splitter surface. The second light beam having passed through the surface is passed through the quarter wave plate and is incident on a second movable mirror.

REFERENCES:
patent: 4693605 (1987-09-01), Sommargren
patent: 4802765 (1989-02-01), Young et al.
patent: 4813783 (1989-03-01), Torge
patent: 4859066 (1989-08-01), Sommargren
patent: 4881815 (1989-11-01), Sommargren
patent: 4930894 (1990-06-01), Baldwin
patent: 5064289 (1991-11-01), Bockman
patent: 5270793 (1993-12-01), Chour et al.

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