Interferometer apparatus for both low and high coherence...

Details Interferometer apparatus for both low and high coherence... Interferometer apparatus for both low and high coherence...

2006-01-31

2006-01-31

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S497000

Reexamination Certificate

active

06992779

ABSTRACT:
A Fizeau interferometer apparatus is used for both low and high interference measurement. When irradiating a reference surface and a sample with a low coherent luminous flux, a path-matching passage divides the low coherent luminous flux into first and second paths, while the optical path length difference between the respective luminous fluxes passed through the two paths equals twice the optical distance between the reference surface and the sample. When irradiating the reference surface and the sample with a high coherent luminous flux, the luminous flux is made incident on the sample side of the path-matching passage at a position coaxial with the low coherent luminous flux.

REFERENCES:
patent: 6781700 (2004-08-01), Kuchel
patent: 6879402 (2005-04-01), Kuchel
patent: 09-021606 (1997-01-01), None
patent: 2004-37165 (2004-02-01), None
Hotate, Kazuo, et al., “Photonic Sensing by Synthesis of Coherence Function”, Proceedings of 15th Meeting on Lightwave Sensing Technology, May 1995, pp. 75-82, Japan.

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