Interferometer and shape measuring method

Details Interferometer and shape measuring method Interferometer and shape measuring method

2008-07-08

2008-07-08

Chowdhury, Tarifur R (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S515000

Reexamination Certificate

active

07397570

ABSTRACT:
A wavelength-variable light source is configured to emit a light with a wavelength (λ), which is variable within a scan width (Δλ). An interferometer has a coherent length (ΔL), which is determinable from (Δλ) and (λ). A controller determines an appropriate magnitude of the scan width (Δλ) while a CCD camera captures a fringe image in an exposure time (Te), which is set longer than a time for wavelength scanning.

REFERENCES:
patent: 5398113 (1995-03-01), de Groot
patent: 2004/0190002 (2004-09-01), Schulte et al.
patent: 2005/0030550 (2005-02-01), Nahum
patent: 1 505 365 (2005-02-01), None
patent: A 2-287107 (1990-11-01), None
patent: A 2001-91223 (2001-04-01), None
Marron et al., “Three-dimensional imaging using a tunable laser source,” Optical Engineering, vol. 39, No. 1, pp. 47-51, Jan. 2000.
Kuwamura et al., “Wavelength scanning profilometry for real-time surface shape measurement,” Applied Optics, vol. 36, No. 19, pp. 4473-4482, Jul. 1997.
Yamaguchi et al., “Surface topography by wavelength scanning interferometry,” Optical Engineering, vol. 39, No. 1, pp. 40-46, Jan. 2000.

Affiliated with

Also associated with

Rating

Interferometer and shape measuring method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Interferometer and shape measuring method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interferometer and shape measuring method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2806562