Interferometer and position measuring device

Details Interferometer and position measuring device Interferometer and position measuring device

2005-07-05

2005-07-05

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

Reexamination Certificate

active

06914682

ABSTRACT:
An interferometer or an interference position measuring device is constituted so that a low coherency light source (multi-mode semiconductor layer) or a plurality of light sources with different wavelengths are used as a light source, a light flux is split into two light fluxes in a light transmitting member, one light flux (reference light flux) is emitted to a reference mirror fixed to an optical head, and the other light flux is emitted to an object to be measured which moves or displaces, the respective reflected light fluxes are multiplexed in the transmitting member so that an interference light flux is obtained, a specified wavelength light is extracted by a wavelength selecting filter through which only a specified wavelength light transmits so as to be detected by a light receiving element.

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