Interferometer and interferance measurement method

Details Interferometer and interferance measurement method Interferometer and interferance measurement method

2006-09-12

2006-09-12

Lee, Andrew H. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S513000, C356S521000, C378S036000

Reexamination Certificate

active

07106455

ABSTRACT:
There is provided an interferometer for measuring a surface shape of an optical element using interference, including a reference wave-front generating unit for generating a reference wave front for measuring the surface shape, which is provided in a target optical path, and includes an Alvarez lens.

REFERENCES:
patent: 3305294 (1967-02-01), Alvarez
patent: 4536086 (1985-08-01), Shemwell
patent: 4725144 (1988-02-01), Nelson et al.
patent: 4743117 (1988-05-01), Kitabayashi et al.
patent: 4958931 (1990-09-01), Tatian
patent: 5530547 (1996-06-01), Arnold
patent: 5625454 (1997-04-01), Huang et al.
patent: 5737079 (1998-04-01), Burge et al.
patent: 5898501 (1999-04-01), Suzuki et al.
patent: 6312373 (2001-11-01), Ichihara
patent: 6342703 (2002-01-01), Koga et al.
patent: 6456382 (2002-09-01), Ichihara et al.
patent: 2002/0176090 (2002-11-01), Ohsaki et al.
patent: 5-1970 (1993-01-01), None
patent: 7-229721 (1995-08-01), None
patent: 2000-97666 (2000-04-01), None
patent: 2000-133579 (2000-05-01), None
patent: 2002-310611 (2002-10-01), None
patent: 2002-310612 (2002-10-01), None

Affiliated with

Also associated with

Rating

Interferometer and interferance measurement method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Interferometer and interferance measurement method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interferometer and interferance measurement method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3616989