Interferometer and interferance measurement method

Details Interferometer and interferance measurement method Interferometer and interferance measurement method

2005-01-11

2005-01-11

Lee, Andrew H. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S450000

Reexamination Certificate

active

06842255

ABSTRACT:
There is provided an interferometer for measuring a surface shape of an optical element using interference, including a reference wave-front deformation system for deforming a wave front of reference light.

REFERENCES:
patent: 4536086 (1985-08-01), Shemwell
patent: 4725144 (1988-02-01), Nelson et al.
patent: 6002480 (1999-12-01), Izatt et al.
patent: 6545761 (2003-04-01), Aziz et al.
patent: 20030011783 (2003-01-01), Suzuki et al.

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