Interferometer alignment control apparatus

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

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Details

2502019, 359847, G02B 2602

Patent

active

051022141

ABSTRACT:
An alignment and path length control apparatus having a mirror housing having a base and a closed wall. The base has a mirrored external surface. The closed wall has a central axis. The closed wall is joined to the base at a base end of the closed wall by a flexible web. The closed wall extends above the base and terminates at a rim defining an aperture. The base has a central region coupled to the cylindrical wall. A post extends from the central region of the base within the cylindrical wall to a top end. A mirror axis extends from the mirrored external surface through the post. The central axis is substantially parallel to the mirror axis. An alignment transducer responds to a first alignment control signal by applying at least a first force between the post and the wall to deflect the mirror axis with respect to the central axis. A linear transducer responds to a linear displacement control signal by applying an axial force to the post to displace the central region longitudinally along the central axis.

REFERENCES:
patent: 4340304 (1982-07-01), Massie
patent: 4444501 (1984-04-01), Schwiesow
patent: 4572669 (1986-02-01), James et al.
patent: 4711573 (1987-12-01), Wijntjes et al.
patent: 4954700 (1990-09-01), Trozpek

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