Interferential position measuring device

Details Interferential position measuring device Interferential position measuring device

1992-05-18

1995-06-27

Housel, James C.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

250237G, 25023113, H01J 314, G01B 902

Patent

active

054284457

ABSTRACT:
The invention relates to an interference device having a light source, detectors, and at least two diffraction elements with identical or only slightly different diffraction structures, wherein the parameters of the diffraction structures of the diffraction elements vary continuously as a function of location.

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